MKS T3B Series User Manual

Chapter Two: RS-232 Message Summary
50
OS1 Analog Out Pressure Input
OS2 Analog Out Position Input
OZ1 Calibrate Analog Out Pressure Zero
OZ2 Calibrate Analog Out Position Zero
P1 Set Process Limit1 Low
P2 Set Process Limit1 High
P3 Set Process Limit2 Low
P4 Set Process Limit2 High
PC Set Phase Compensation Factor
PLS Set Process Limit Source 
Q Stop Learn Valve T3X (while in progress)
R Get Position Pressure
R0 Get Analog Setpoint Value
R1 Get Setpoint A Value
R10 Get Setpoint E Value
R11 Get Process Limit1 Low
R12 Get Process Limit1 High
R13 Get Process Limit2 Low
R14 Get Process Limit2 High
R15 Get SoftStart Setpoint A % Value
R16 Get SoftStart Setpoint B % Value
R17 Get SoftStart Setpoint C % Value
R18 Get SoftStart Setpoint D % Value
R19 Get SoftStart Setpoint E % Value
R2 Get Setpoint B Value
R20 Get SoftStart Analog Setpoint % Value
R21 Get SoftStart Open valve % Value
R22 Get SoftStart Close Valve % Value
R23 Get Valve Type (same as RJT)
R24 Get Analog Setpoint Range
R25 Get Analog Setpoint = Position/Pressure
R26 Get Setpoint A = Position/Pressure
R27 Get Setpoint B = Position/Pressure
R28 Get Setpoint C = Position/Pressure
R29 Get Setpoint D = Position/Pressure
R3 Get Setpoint C Value
R30 Get Setpoint E = Position/Pressure
R31 Get Valve Position Output Range (B1=10V)
R32 Get Valve Action (N0=normal)
R33 Get High Sensor Range
R34 Get Pressure Units (Torr, mbar, etc.)
R35 Get Sensor Voltage Range
R36 Get Sensor Type (U0=Absolute)
R37 Get System Status Reports
R38 Get Software Version
R39 Get Battery Stats (T3P only)
R4 Get Setpoint D Value
R41 Get Phase Setpoint A Value
R42 Get Phase Setpoint B Value
R43 Get Phase Setpoint C Value
R44 Get Phase Setpoint D Value
R45 Get Phase Setpoint E Value
R46 Get Gain Setpoint A Value
R47 Get Gain Setpoint B Value
R48 Get Gain Setpoint C Value
R49 Get Gain Setpoint D Value
R5 Get Pressure as % of FS
R50 Get Gain Setpoint E Value
R51 Get Pressure Control Mode =Model Based/PID
R52 Get Checksum Status (0 = OK, 1 = Error)
R53 Get Phase Analog Setpoint
R54 Get Gain Analog Setpoint
R55 Get Low Sensor Range
R56 Get Valve Slip (VS0=no slip, VS1=slip)
R57 Get Local preset setpoint pressure phase
R58 Get Local preset setpoint pressure gain
R6 Get Valve Position as % of Open
R60 Get Tau
R63 Get Nonlinear Flow Observer Tau
R64 Get Nonlinear Trajectory Shape
R65 Get Nonlinear Trajectory Tau
R66 Get Full Build String
R7 Get System Status M x y z w
R77 Get Local preset setpoint pressure
R78 Get Local preset setpoint position

MKS T3B Series Specifications

General

Brand	MKS
Model	T3B Series
Category	Control Unit
Language	English