MKS T3B Series User Manual

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R8 Get Valve Slip (C0=no, C1=slip)
R87 Get Local preset softstart pressure
R88 Get Local preset softstart position
RAI Get Valve Air Interlock Status
RB Get Status of Backfill Relay - Open/Close
RBD Get Backfill Delay
RBE Get Backfill Valve Enable/Disable
RBL Get Backfill Control Limit
RCD Get Pump Speed Data Table Data
RCH Get Checksum
RCL Get channel lock
RCP Get Pump Speed Table Pedestal
RCT Get Pump Speed Data Table Number
RCV Get Pump Speed Data Value
RD Get Auto Crossover Delay
RDO Get Device Option
REN Get Encoder Valve Position (% Open)
RGC Get Gain Compensation Factor -
RHC Get High Channel Crossover
RHR Get High sensor Range
RIE Get Interlock Enabled Status
RIN Get Valve Interlock Status
RJT Get Valve Type - Duplicate or R23
RLC Get Low Channel Crossover
RLE Get Estimated Learn Flow
RLF Get Learned Flow
RLP Get Analog Input filter samples
RLR Get Low sensor Range
RLS Get Process Limit Source
RMD Get Backfill Threshold Pressure
ROC Get Analog Out Calibration status
ROI Get Analog Output Input (as % of 10VDC )
ROM Get Operating Mode
ROS Get Analog Output Source
RPC Get Phase Compensation Factor
RPO Get Platform Option (B or P)
RRS Get Relay A/B Status
RSE Get Slow Pump Enable
RSN Get Serial Number of the Unit
RSR Get Slow Pump Rate
RSS Get Valve Safe State Open/Close/Hold
RTC Report valve temperature in Celsius
RTF Report valve temperature in Farenheit
RUE Get Speed Up Enable Setting
RUF Get Speed Up Filter Setting
RUT Get Speed Up Time Setting
RVE Get Volume Estimate Status Enable 1 is On,
0 is Off
RVO Get Chamber Volume Setting
RVS Get Span Valve Steps
RZZ Get Devicenet service state
S1 Setpoint Value A
S2 Setpoint Value B
S3 Setpoint Value C
S4 Setpoint Value D
S5 Setpoint Value E
S6 Analog Setpoint Value
S7 Set Local preset setpoint pressure
S8 Set Local preset setpoint position
S
Set Slow Pump recipe and value
SCD
Set Pump Speed Data 
SCP
Set Pump Speed Pedestal 
SCT
Switch Pump Speed Table 
SE Set Slow Pump Enable
SHR Set High sensor Range
SLF Set Learn Flow 
SLR Set Low sensor Range
SR Set Slow Pump Rate
SS0 Set Valve Safe State - Open Valve
SS1 Set Valve Safe State - Close Valve
SS2 Set Valve Safe State - Hold Valve
SS4
Set Valve Safe State - Cycle Valve 
STA
Set Tau 
STD
Set Nonlinear Flow Observer Tau 
STE
Set Nonlinear Trajectory Shape 
STF
Set Nonlinear Trajectory Tau 
SUE
Set Speedup Enable 1 is On, 0 is Off 
SUF
Set Speedup Filter 
SUT
Set Speedup Time 
SVE
Set Volume Estimate Enable 1 is On, 0 is Off 
SVN
Set Valve Normal Mode
SVO
Set Chamber Volume 

MKS T3B Series Specifications

General

Brand	MKS
Model	T3B Series
Category	Control Unit
Language	English