MKS T3B Series User Manual

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The controller responds with the message [I x value], where:
x: 1 = Setpoint A rate
2 = Setpoint
B rate
3 = Setpoint C rate
4 = Setpoint D rate
5 = Setpoint E rate
6 = Analog setpoint rate
7 = Valve open rate
8 = Valve close rate
value:
0.1 (slowest) to 100% (fastest) of valve full speed
If the softstart rate for setpoint A is set to 100%, an exa
mple response is:
I 1 100
To change the softstart rate for setpoint A to 50% enter:
I 1 50
Setting the Process Limit Rela
ys
The [P
x value]
command sets the process limit relay thresholds, where:
x: 1 = Low threshold – Process Limit 1
2 = High thre
shold – Process Limit 1
3 = Low threshold – Process Limit 2
4 = High threshold – Process Limit 2
value:
Pressure limit as % FS of High Sensor or Position as %
(typical values are betw
een 0% and 100% of the sensor range with pressure control)
% of open (0 to 100% with position control)
To report a process limit threshold, issue the request:
R xx
where xx:
11 = Low threshold – Process Limit 1
12 = High threshold – Process Limit 1
13 = Low threshold – Process Limit 2
14 = High threshold – Process Limit 2
The controller responds with the message [P
x val
ue], where:
x: 1 = Low threshold – Process Limit 1
2 = High thre
shold – Process Limit 1
3 = Low threshold – Process Limit 2
4 = High threshold – Process Limit 2
value: Pressure
li
mit
To report the low threshold for process limit 1, enter:
R 11
An exam
ple response, if the low threshold for process limit 1 is 100 Torr, is:
P 1 100

MKS T3B Series Specifications

General

Brand	MKS
Model	T3B Series
Category	Control Unit
Language	English