MKS Instruments UK Ltd
V2000-C/E Hardware Manual – SP102005.102 March 2013 14
Vacuum System installation
As much of the system as possible has been shipped pre-assembled. The whole of your Vision 2000-C/E system
has been assembled and tested before being partially dissembled prior to shipping.
CAUTION
The vacuum system interface components are of high precision
and should only be fitted by competent personnel.
RGA vacuum chamber overview
The Vision 2000-C/E is supplied with the RGA vacuum chamber already assembled; the quadrupole analyser is
fitted into the chamber, the turbomolecular pump is also fitted as is the 3- or 4-valve UniBloc™ inlet assembly.
The inlet valves are controlled from the Remote Vacuum Controller (RVC2).
Integral to the UniBloc™ body are all necessary pressure-sampling orifices. The three basic UniBloc
configurations have been summarized on Page 10.
Please refer to the shipment report for details of the inlet configuration. The inlet configuration of your Vision
2000C/E has makes little difference to its installation. On the face of the UniBloc™ inlet valve that connects to
the RGA chamber is a ceramic CIS (closed ion source) coupling.
Exchanging an inlet valve assembly is a reasonable operation to perform in the field, though advice must be
sought on the correct seating and conditioning of the valve’s sealing face.
It is also possible to change the internal orifices if they become plugged, or if it becomes necessary to change
the operating pressure range(s). However, changing internal components of a UniBloc™ in the field is not
currently recommended.
If you suspect that you need to have your UniBloc™ serviced, please consult the local MKS Instruments facility
regarding appropriate servicing options.
Fitted to the other side of the process valve there might be various adapting components, such as an elbow, an
elbow and nipple or two elbows. The exact configuration will depend on the type of process tool to which the
Vision 2000C/E is to be fitted.
CAUTION
The inlet flange of the UniBloc™ is tapped for bolts that are ¼” x
28 thread/inch by 7/8” long. Silver-plated bolts, or equivalent
lubrication, must be used to avoid damaging the UniBloc™ body.
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