MKS Vision 2000-C - Table of Contents

MKS Instruments UK Ltd
V2000-C/E Hardware Manual – SP102005.102 March 2013 7
Table of Contents
ADDITIONAL INSTALLATION MAINTENANCE AND OPERATING INSTRUCTIONS .................................................................. 5
INSTALLATION ............................................................................................................................................................................ 5
OPERATION ............................................................................................................................................................................... 5
MAINTENANCE ........................................................................................................................................................................... 5
TABLE OF CONTENTS ................................................................................................................................................................... 7
HEALTH & SAFETY .............................................................................................................................................................. 8
WARNING SYMBOLS .................................................................................................................................................................... 9
FUSES ..................................................................................................................................................................................... 10
ELECTRICAL CONNECTIONS .......................................................................................................................................................... 10
INSTALLATION ................................................................................................................................................................. 11
SYSTEM OVERVIEW ................................................................................................................................................................... 11
SYSTEM OPTIONS ...................................................................................................................................................................... 12
UNPACKING ............................................................................................................................................................................. 13
VACUUM SYSTEM INSTALLATION .................................................................................................................................................. 14
RGA vacuum chamber overview ...................................................................................................................................... 14
DIMENSIONSSYSTEM COMPONENTS ............................................................................................................................................. 15
MAIN CHAMBER INSTALLATION ................................................................................................................................................... 19
Pneumatic actuation and Purge Gases ............................................................................................................................ 19
Connecting the foreline and SurgeProtector valve........................................................................................................... 19
Heater jackets .................................................................................................................................................................. 20
MicroVision2 installation ................................................................................................................................................. 20
ELECTRICAL INSTALLATION .......................................................................................................................................................... 21
Equipment rack ................................................................................................................................................................ 22
Interconnecting cables ..................................................................................................................................................... 22
CONNECTING TO THE PROCESS TOOL ............................................................................................................................................ 23
Mains power .................................................................................................................................................................... 23
Computer connection ....................................................................................................................................................... 23
OPERATION ............................................................................................................................................................................. 25
Overview .......................................................................................................................................................................... 25
Start up ............................................................................................................................................................................ 26
Leak checking ................................................................................................................................................................... 27
Heating and Baking .......................................................................................................................................................... 28
Inlet operation.................................................................................................................................................................. 29
System shut down procedure ........................................................................................................................................... 29
MAINTENANCE ................................................................................................................................................................ 31
Inlet gauge zero ............................................................................................................................................................... 31
Operating pressure .......................................................................................................................................................... 31
Removing the inlet valve assembly .................................................................................................................................. 32
Refitting the inlet valve assembly .................................................................................................................................... 32
Vision 2000C/E electronics ............................................................................................................................................... 32
Turbo pump maintenance ................................................................................................................................................ 32
Mass spec maintenance ................................................................................................................................................... 32
Removing the analyser ..................................................................................................................................................... 34
Re-fitting the analyser ...................................................................................................................................................... 34
RETURNING YOUR EQUIPMENT .................................................................................................................................................... 35
Support Contact Numbers ................................................................................................................................................ 35
Health and safety clearance form .................................................................................................................................... 35