MKS Vision 2000-C - Page 16

MKS Instruments UK Ltd
V2000-C/E Hardware Manual – SP102005.102 March 2013 16
System Components
Item Ref
Description
1
HiVac OK – (1T or 10T depending on working pressure) 722 Baratron Gauge
2
LoVacOK – 890B Gauge
3
UniBloc™ inlet assembly
4
Purge regulator assembly – 3.5 to 8Bar Argon or dry Nitrogen supply required **
5
System Interface Module
6
Turbo molecular pump and controller
7
** The Purge supply regulator is factory set and requires no adjustment.
2
1
6
5
4
3
Purge Gas
Inlet