MKS Instruments UK Ltd
V2000-C/E Hardware Manual – SP102005.102 March 2013 33
Also, the ion source may need to be cleaned which would be done as part of the filament replacement
procedure, again this is fully described in the Microvision2 manual. A filament needs to be replaced when it will
no longer turn on, as indicated by the software status when running the system.
Finally, after a significant number of hours of process gas exposure, the electron multiplier (SEM) detector will
also require replacement. In extreme cases, this can be as soon as 3 months, but 1-2 years is more typical. For
non-corrosive gas sampling, SEM performance is often acceptable for several years. The SEM will need to be
replaced when the bias voltage required to achieve the required sensitivity is near the limit of the electronics
(1500V for the channel-plate type of detector).
CAUTION
The quadrupole analyser is a delicate instrument that is easily
damaged and can be expensive to repair. The safest place for the
analyser is in its vacuum chamber, so leave the analyser where it
is until you have everything ready.
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