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AL120-6 Series
Olympus AL120-6 Series - User Manual
80 pages
Manual
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Operation Manual
Wafer Loader
ＡＬ
120
-
6
S
e
r
i
e
s
ＡＬ
120
-
86
S
e
r
i
e
s
Thank
y
ou for purchasing the Oly
mpus AL1
20 Series W
af
er Loader.
In order to fully
utili
ze its performance and secure saf
ety
, please read this manual before operation.
Please also keep it at hand d
uring operation as w
ell as for future referenc
e.
AX
783
3-05
2
Table of Contents
Main Page
Table of Contents
20
Stoppage of Transfer
43
Inspections
45
Preparations
45
Inspection Operations
45
Special Operations
57
Specifications
59
AL120-L6-150 and LMB6-150
59
Problems During Use and Solutions
67
When Warning Codes Are Displayed
67
When Error Codes Are Displayed
69
How to Reset the Circuit Breaker
73
After Use of Loader Stop
73
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Olympus AL120-6 Series Specifications
General
Brand
Olympus
Model
AL120-6 Series
Category
Laboratory Equipment
Language
English
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