Acquiring Images / VS120-S1
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10 Setting the Focus (Expert) (Virtual-Z)
Select the grid density for the focus map.
(
(Fine focus grid density) is selection for
normal use.)
The method for adjusting the focus can be set using
[Focus Logic]. If [Semi-automatic focusing] is selected,
focus can be adjusted manually after the focus is
automatically set.
For more information on Focus Logic, refer to Section
“1-4 Setting Focus Logic” (page 29) or the online help.
Selecting [Prefocus (flat)] from the [Focus Method]
enables calculation of the horizontal surface by
averaging all the focus map potisions
For more information on the [Focus Method], refer to the
online help.
11 Starting Scanning (Quick) (Expert) (Virtual-Z)
Click .
Scanning starts.
Avoid movement or vibration of the system
during scanning.
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