Omega FMA 5400A - Page 44

39
* Flow rates indicated ( ) is the maximum flow range of the Mass Flow meter being used.
ACTUAL GAS
K FACTOR
Relative to N
2
Cp
[Cal/g]
Density
[g/I]
Deuterium D
2
1.00 1.722 1.799
Diborane B
2
H
6
.4357 .508 1.235
Dibromodifluoromethane CBr
2
F
2
.1947 .15 9.362
Dichlorodifluoromethane (Freon-12) CCl
2
F
2
.3538 .1432 5.395
Dichlofluoromethane (Freon-21) CHCl
2
F
.4252 .140 4.592
Dichloromethylsilane (CH
3
)
2
SiCl
2
.2522 .1882 5.758
Dichlorosilane SiH
2
Cl
2
.4044 .150 4.506
Dichlorotetrafluoroethane (Freon-114) C
2
Cl
2
F
4
.2235 .1604 7.626
1,1-Difluoroethylene (Freon-1132A) C
2
H
2
F
2
.4271 .224 2.857
Dimethylamine (CH
3
)
2
NH
.3714 .366 2.011
Dimethyl Ether (CH
3
)
2
O
.3896 .3414 2.055
2,2-Dimethylpropane C
3
H
12
.2170 .3914 3.219
Ethane C
2
H
6
.50 .420 1.342
Ethanol C
2
H
6
O
.3918 .3395 2.055
Ethyl Acetylene C
4
H
6
.3225 .3513 2.413
Ethyl Chloride C
2
H
5
Cl
.3891 .244 2.879
Ethylene C
2
H
4
.60 .365 1.251
Ethylene Oxide C
2
H
4
O
.5191 .268 1.965
Fluorine F
2
.9784 .1873 1.695
Fluoroform (Freon-23) CHF
3
.4967 .176 3.127
Freon-11 CCl
3
F
.3287 .1357 6.129
Freon-12 CCl
2
F
2
.3538 .1432 5.395
Freon-13 CClF
3
.3834 .153 4.660
Freon-13B1 CBrF
3
.3697 .1113 6.644
Freon-14 CF
4
.4210 .1654 3.926
Freon-21 CHCl
2
F
.4252 .140 4.592
Freon-22 CHClF
2
.4589 .1544 3.858
Freon-113 CCl
2
FCClF
2
.2031 .161 8.360
Freon-114 C
2
Cl
2
F
4
.2240 .160 7.626
Freon-115 C
2
ClF
5
.2418 .164 6.892
Freon-C318 C
4
F
8
.1760 .185 8.397
Germane GeH
4
.5696 .1404 3.418
Germanium Tetrachloride GeCl
4
.2668 .1071 9.565
*Helium He
*Helium He-1 (>50 L/min)
*Helium He-2 (>10-50 L/min)
1.454
2.43
2.05
1.241
1.241
1.241
.1786
.1786
.1786
Hexafluoroethane C
2
F
6
(Freon-116)
.2421 .1834 6.157
Hexane C
6
H
14
.1792 .3968 3.845
*Hydrogen H
2
-1
*Hydrogen H
2
-2 (>10-100 L)
*Hydrogen H
2
-3 (>100 L)
1.0106
1.35
1.9
3.419
3.419
3.419
.0899
.0899
.0899