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Omron ZX2 - Page 9

Omron ZX2
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ZX2
9
Angle Characteristic
Linearity Characteristic for Different Materials
Note:
The x-axis displacement indicates the measurement distance displayed by the amplifier unit. The measurement distance displayed by the amplifier
unit takes the measurement center distance as 0, and the NEAR and FAR sides from the sensor are displayed by + and
−
, respectively.
ZX2-LD50V
Side-to-side Inclination for Flat Mirror
Front-to-back Inclination for Flat Mirror Side-to-side Inclination for Silicon Wafer
Front-to-back Inclination for Silicon Wafer
Side-to-side Inclination for Glass Front-to-back Inclination for Glass
ZX2-LD50V
0° Inclination
Displacement (mm)
Measurement center distance
FAR side NEAR side
Error (%F.S.)
3.0
2.5
2.0
1.5
1.0
0.5
0
-
1.0
-
0.5
-
1.5
-
2.0
-
2.5
-
3.0
-
3
-
5
-
11 3
-
2
-
40245
+ Inclination
-
Inclination
-1.0°
-0.5°
0°
0.5°
1.0°
Displacement (mm)
Measurement center distance
FAR side NEAR side
Error (%F.S.)
3.0
2.5
2.0
1.5
1.0
0.5
0
-
1.0
-
0.5
-
1.5
-
2.0
-
2.5
-
3.0
-
3
-
5
-
11 3
-
2
-
40245
+ Inclination
10.5°
-
Inclination
-1.0°
-0.5°
0°
0.5°
1.0°
Displacement (mm)
Measurement center distance
FAR side NEAR side
Error (%F.S.)
3.0
2.5
2.0
1.5
1.0
0.5
0
-
1.0
-
0.5
-
1.5
-
2.0
-
2.5
-
3.0
-
3
-
5
-
11 3
-
2
-
40245
+ Inclination
-
Inclination
-1.0°
-0.5°
0°
0.5°
1.0°
Displacement (mm)
Measurement center distance
FAR side NEAR side
Error (%F.S.)
3.0
2.5
2.0
1.5
1.0
0.5
0
-
1.0
-
0.5
-
1.5
-
2.0
-
2.5
-
3.0
-
3
-
5
-
11 3
-
2
-
40245
+ Inclination
10.5°
-
Inclination
-1.0°
-0.5°
0°
0.5°
1.0°
Displacement (mm)
Measurement center distance
FAR side NEAR side
Error (%F.S.)
3.0
2.5
2.0
1.5
1.0
0.5
0
-
1.0
-
0.5
-
1.5
-
2.0
-
2.5
-
3.0
-
3
-
5
-
11 3
-
2
-
40245
+ Inclination
-
Inclination
-1.0°
-0.5°
0°
0.5°
1.0°
Displacement (mm)
Measurement center distance
FAR side NEAR side
Error (%F.S.)
3.0
2.5
2.0
1.5
1.0
0.5
0
-
1.0
-
0.5
-
1.5
-
2.0
-
2.5
-
3.0
-
3
-
5
-
11 3
-
2
-
40245
+ Inclination
10.5°
-
Inclination
-1.0°
-0.5°
0°
0.5°
1.0°
Displacement (mm)
Measurement center distance
FAR side NEAR side
Error (%F.S.)
1.0
0.8
0.6
0.4
0.2
0
-0.2
-0.4
-0.6
-0.8
-1.0
-3-5 -1 1 3 5-4 -2 0 2 4
0° Inclination
Flat Mirror
Silicon Wafer
Glass
10.5°

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