Omron ZX2 - Sensor Head

ZX2
3
Sensor Head
47.47.5 mmmm 47.5 mm
35.5 mm
22.6 mm
* If the room temperature varies 1°C, the measured value varies 0.02% F.S.
(corr
esponding to 4µm for the Model ZX2-LD50)
* According to OMRON investigation of CMOS laser
displacement sensors performed in September 2010.
Cable can be
fed through
from the back
World smallest*
Compact sensor for easy mounting
IP67, robot cable
& temperature characteristic 0.02% F.S./°C
Reliable measurements in harsh environments
Spot beam
Precise measurement on
micro-scale objects
Line beam
Stable measurement on
rough-surfaced objects
Regular-reflective
Stable wafer
measurement
•
Measurement range 50 mm ±10 mm
•
Resolution 1.5µm
•
Linearity Line beam ±0.05%F.S.
*1
Spot beam ±0.10%F.S.
*1
•
Beam size Line beam
Approx.60µm×2.6mm
Spot beam
Approx.60µm dia.
ZX2-LD50L Line beam type
ZX2-LD50 Spot beam type
•
Measurement range 100 mm ±35 mm
•
Resolution
5µm
•
Linearity Line beam ±0.05%F.S.
*2
Spot beam ±0.10%F.S.
*2
•
Beam size Line beam
Approx.110µm×2.7mm
Spot beam
Approx.110µm dia.
ZX2-LD100L
Line beam type
ZX2-LD100
Spot beam type
•
Measurement range
48 mm ±5 mm
•
Resolution
1.5µm
•
Linearity Spot
b
eam
±0.3%F.S.
•
Beam size Spot beam
Approx.60µm dia.
ZX2-LD50V Spot beam type
*1 Using 40 to 50mm
*2 Using 65 to 100mm
(regular-reflective)
Sensor Heads for Various Applications-select
the Range and Type of Beam
New Regular-reflective Sensor Head Designed for Optimal Wafer Measurement
IP67 protection class enables to use the sensor in harsh
environments. A robot cable is used as standard between the
head and amplifier, that the unit can be used reliably on moving
parts. In addition, as 3D UV bond is used to fix the optical
components rather than screws, stress can be controlled and a
temperature characteristic 0.02% F.S./°C* is realized.
The world’s smallest CMOS laser displacement sensor
head is realized in a resin case. Enables to mount the
sensor in smallest spaces and to minimize measure-
ment errors arising from temperature fluctuations.