PI PiezoWalk E-712 - Table of Contents

User Manual
E712T0010, valid for E-712.N1, E-712.1AM, E-712.1AN, .2AN, .3AN
CMo, BRo, 10/31/2024
Physik Instrumente (PI) SE & Co. KG, Auf der Römerstraße 1, 76228 Karlsruhe, Germany page 2 / 40
Phone +49 721 4846-0, fax +49 721 4846-1019, e-mail info@pi.ws, www.pi.ws
Contents
1 Introduction ....................................................................................................................................... 3
1.1 Documentation Overview ................................................................................................................. 3
1.2 Hardware Components ..................................................................................................................... 3
1.3 Firmware Update ............................................................................................................................. 4
1.4 Software Overview .......................................................................................................................... 4
2 Safety Precautions ............................................................................................................................... 4
3 Working Principle of PiezoWalk® Drives ................................................................................................. 4
3.1 Special Characteristics of NEXLINE® Drives .......................................................................................... 5
3.2 Special Characteristics of NEXACT® Drives .......................................................................................... 6
3.3 Special Characteristics of PICMAWalk Drives ....................................................................................... 7
3.4 Driving Modes—Overview ................................................................................................................ 8
3.5 Full-Step Mode ................................................................................................................................ 8
3.6 Nanostepping Mode ...................................................................................................................... 10
3.7 Analog Mode ................................................................................................................................. 11
4 Relax State and Relax Procedure ......................................................................................................... 12
4.1 Simple Relax Procedure .................................................................................................................. 12
4.2 Iterative Relax Procedure ................................................................................................................ 12
4.3 Creep Reduction Procedure for NEXLINE® Drives ............................................................................... 15
5 Axes and Channels
............................................................................................................................. 17
5.1 Logical Axes .................................................................................................................................. 17
5.2 PiezoWalk Channels ....................................................................................................................... 17
5.3 Piezo Amplifier Channels ................................................................................................................ 17
5.4 Sensor Channels ............................................................................................................................ 18
5.5 Assignment of Channels to Axes ...................................................................................................... 18
6 Operation ......................................................................................................................................... 21
6.1 How to Select the Driving Mode ...................................................................................................... 21
6.2 How to Command Motion .............................................................................................................. 22
7 Configuration .................................................................................................................................... 23
7.1 Replacement of Mechanics ............................................................................................................. 23
7.2 Parameter Adjustment ................................................................................................................... 23
7.2.1 Selection of the PiezoWalk® Drive Type ..................................................................................... 23
7.2.2 Parameters for PiezoWalk® Drive Performance .......................................................................... 24
7.2.3 PiezoWalk® Linearization Parameters........................................................................................ 29
7.2.4 Parameters for Closed-Loop Control ......................................................................................... 29
7.3 Configuration Example ................................................................................................................... 30
8 Parameters ....................................................................................................................................... 33
© 2024 Physik Instrumente (PI) SE & Co. KG, Karlsruhe, Germany. The text, photographs, and drawings in this
manual are protected by copyright. With regard thereto, Physik Instrumente (PI) SE & Co. KG retains all the
rights. The use of any text, images and drawings is permitted only in part and only when indicating the source.
The software products provided by PI are subject to the General Software License Terms of Physik Instrumente
(PI) SE & Co. KG and may contain and/or use third-party software components. Further information can be
found in the
General Software License Agreement and in the Third Party Software Note on our website.