User Manual
E712T0010, valid for E-712.N1, E-712.1AM, E-712.1AN, .2AN, .3AN
CMo, BRo, 10/31/2024
Physik Instrumente (PI) SE & Co. KG, Auf der Römerstraße 1, 76228 Karlsruhe, Germany page 6 / 40
Phone +49 721 4846-0, fax +49 721 4846-1019, e-mail info@pi.ws, www.pi.ws
3.2 Special Characteristics of NEXACT® Drives
A NEXACT® piezo drive module consists of four NEXACT® piezo actuators. The individual actuators themselves
each consist of two segments of piezo bender elements.
The voltage range for the NEXACT® piezo bender elements is -10 to + 45 V.
Runner
NEXACT®
piezo drive module
Actuator
Segment (piezo
bender
element)
NEXACT® piezo actuator pairs of one piezo drive module: Pair 1 Pair 2
Fig. 3: NEXACT® drive with one piezo drive module, shown in rest position
With NEXACT® piezo actuators, the clamping and shearing components result from the coordinated motion of the
bender segments. For that reason, the four voltages d11, d12, d21 and d22 required by NEXACT® drives are
transformed by the PiezoWalk® firmware into the voltage signals for shearing (D1, D2) and for clamping (C1, C2).
The basic model is as follows:
C1 = (d11 + d12)/2 (common motion of piezo actuator pair 1 ↔ clamping component)
C2 = (d21 + d22)/2 (common motion of piezo actuator pair 2 ↔ clamping component)
D1 = (d11 - d12) (bending motion of piezo actuator pair 1 ↔ shearing component)
D2 = (d21 - d22) (bending motion of piezo actuator pair 2 ↔ shearing component)
In the PiezoWalk® firmware, the following simplification is used to reduce the amount of parameters (see p. 18
and p. 33 for further information regarding parameters):
d11 = D1 PiezoWalk Shear Channel 1, parameter ID 0x09000100
d12 = D2 PiezoWalk Shear Channel 2, parameter ID 0x09000101
d21 = C1 PiezoWalk Clamp Channel 1, parameter ID 0x09000200
d22 = C2 PiezoWalk Clamp Channel 2, parameter ID 0x09000201
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