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PRECITEC CHRocodile C - Typical Applications (Overview)

PRECITEC CHRocodile C
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2.5 Typical applications (Overview)
A broad range of possible applications is available to this highly precise sensor.
The CHRocodile C is the most compact sensor based on confocal chromatic imaging principle. This
sensor is perfectly suitable for demanding measuring tasks, like non-contact measurement of
microtopography, layer thickness measurements. It could be used both on various reflecting and
scattering surfaces.
The PRECITEC confocal chromatic compact sensor is very well adapted to industrial environment, as
no optical cable are connected to the CHRocodile C unit. The absence of optical cables, promotes
robustness and compactness of the measuring device, and also facilitates the integration and use on
a motorized moving system, such as a coordinate measuring machine (CMM). Then this new type of
sensor overcomes the industrial constraints induced by fiber optic cables that are known to deteriorate
when the measuring device is subject to high accelerations and / or rotational movements.
The CHRocodile C offers the ability to perform fast and accurate metrological control of production, by
being built on automatic or semi-automatic inspection machines, or by being directly integrated on
production line for 100% inspection of manufactured parts. In this, this new technology fully meets the
current needs of the industry as it is suitable for many applications:
- The measurement of wafer in the field of semiconductor and generally microelectronics,
- The measurement and online control of mechanical or optical parts,
- Or even the measurement and control of glass or plastic film thickness.
Other fields of applications exist, the common point is to seek a cost effective measurement system
going, more and more compact, as flexible as possible, and highly accurate. It is the case in laboratory
environment and even more in industrial environment. It appears clearly here that the CHRocodile C
unit of measurement meet these different needs.
Optical Head
Application
Probe
200µm
Probe
1mm
Probe
4mm
Probe
10mm
Electronics



Micro-Electronics


Mechanics



Micro-Mechanics


Optics



Micro-Optics


Shape



Flatness


Roughness


Plastic and glass thickness




Thin film thickness


Coating thickness

Table 2.1: Sensor applications

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