PRECITEC CHRocodile C - Optical Probes Characteristics

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(3) See section 2.9: CHRocodile C performance Specifications.
(4) Resolution / Repeatability is given for optimal conditions (with a high intensity signal).
2.8.2 Optical probes characteristics
Optical probe
Specifications
Probe 200µm
Probe 1mm
Probe 4mm
Probe 10mm
DISTANCE
MODE
Measuring range
(1)
200µm
1mm
4mm
10mm
Axial resolution /
Repeatability (R
min
)
(4)(5)(6)
8nm
30nm
120nm
300nm
Accuracy
(4) (5)
50nm
200nm
0.8µm
2µm
THICKNESS
MODE
Min. measurable
thickness
(4) (7)
8µm
40µm
160µm
400µm
Max. measurable
thickness
(4) (7)
300µm
1.5mm
6mm
15mm
Axial resolution /
Repeatability
(4)
20nm
75nm
300nm
750nm
GLOBAL
SPECIFICATIONS
Working distance
(1) (2)
4.7mm +/- 0.3mm
15.7mm +/- 0.5mm
36.7mm +/- 0.7mm
68.7mm +/- 1mm
Spot diameter
(1)
3.4µm
5µm
8µm
16µm
Lateral resolution
1.7µm
2.5µm
4µm
8µm
Max object slope
(1) (3)
+/- 45deg
+/- 28deg
+/- 20deg
+/- 14deg
MECHANICAL
DIMENSIONS
Length
17mm
(8)
23.7mm
(8)
26.6mm
(8)
35.3mm
(8)
Diameter
28mm
(8)
28mm
(8)
33.8mm
(8)
40mm
(8)
Weight
33g
30g
44g
50g
Table 2.7: Optical Head Specifications
(1) See section 2.9: Optical probe specifications definitions
(2) Bottom of the optical probe to middle of the measuring range
(3) Decreasing accuracy on the limits
(4) See section 2.10: CHRocodile C performance Specifications
(5) Measurement on perpendicular mirror at 20°C with optimal Signal to Noise ratio.
(6) Axial Resolution varies with intensity signal in %. Axial Resolution = 10 x R
min
x I
-0.5
(7) Refractive index n=1.5
(8) See Fig A2-1: Optical probes mechanical plan
(9) See Fig A2-2: CHRocodile C unit mechanical plan