PRECITEC CHRocodile CLS0.2 - Optical Heads Characteristics

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2.7.3 Optical Heads characteristics
Optical Head
Specifications
CLS0.2 CLS1 CLS2.3 CLS4
GLOBAL SPECIFICATIONS
Line Length
(1)
0.96mm +/-
0.01mm
1.91mm +/-
0.02mm
1.53mm +/-
0.02mm
4.78mm +/-
0.04mm
Working Distance
(1) (2)
5.3mm +/-
0.4mm
18.5mm +/-
0.5mm
15.6mm +/-
0.5mm
36.4mm +/-
0.6mm
Pitch along the line
(1)
5 +/- 0.05µm 10 +/- 0.1µm 8 +/- 0.08µm 25 +/- 0.25µm
Spot diameter
(1)
2µm 4µm 3.2µm 10µm
Max Object Slope
(1) (3)
+/- 44deg +/- 33deg +/- 33deg +/- 20deg
DISTANCE
MODE
Measuring Range
(1)
200µm 950µm 2300µm 3.9mm
Axial Resolution (R
min
)
(4) (5) (6)
20nm 80nm 200nm 320nm
Accuracy
(4) (5)
80nm 300nm 780nm 1.2µm
THICKNESS
MODE
Min. Measurable
Thickness
(4) (7)
20µm 75µm 200µm 300µm
Max. Measurable
Thickness
(4) (7)
280µm 1.35mm 3.1mm 5.5mm
Axial Resolution
(4)
60nm 200nm 500nm 800nm
MECHANICAL
DIMENSIONS
Length 70.35mm
(8)
93.3mm
(8)
99.5mm
(8)
120mm
(8)
Diameter 37mm
(8)
54mm
(8)
54mm
(8)
58mm
(8)
Weight 190g 430g 390g 510g
Model
Right angled or
Straight
(9)
Right angled or
Straight
(9)
Right angled or
Straight
(9)
Right angled or
Straight
(9)
Table 2.8: Optical Head Specifications
(1) See section 2.8: Optical Head Specifications definitions
(2) Bottom of the optical probe to middle of the measuring range
(3) Decreasing accuracy on the limits
(4) See section 2.9: CHRocodile CLS performance Specifications
(5) Measurement on perpendicular mirror at 20°C with optimal Signal to Noise ratio.
(6) Axial Resolution varies with intensity signal in %. Axial Resolution = 10 x R
min
x I
-0.5
(7) Refractive index n=1.5
(8) See Fig 6-1: Optical Head Mechanical plan
(9) See Fig 6-2: CHRocodile CLS unit mechanical plan