PRECITEC CHRocodile CLS0.2 - Chrocodile CLS Performance Specifications

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2.9 CHRocodile CLS performance specifications:
Axial Resolution:
Axial resolution corresponds to the static noise (standard deviation 1) on altitude or thickness
measurements. It is an experimental specification. It is measured on 1000 continuous points along the
measuring range for each channel along the line. Axial resolution as a function of object position inside
measuring range is calculated for each channel along the line. By default axial resolution specification
corresponds to the minimum value (R
min
). (See Fig. 2-11),
Fig 2-11: Axial Resolution as function of object position in Measuring Range for one channel
Accuracy:
Accuracy corresponds to the altitude deviation for each channel along the measuring range between
the CHRocodile CLS and a calibrated interferometric reference sensor. Consequently, accuracy is an
experimental specification. Accuracy as a function of object position inside measuring range is
calculated for each channel along the line. By default accuracy specification corresponds to the
maximum of absolute value (A
max
). (See Fig. 2-12),
Fig 2-12: Accuracy as function of object position in Measuring Range for one channel
Position in the
Measuring Range
Channel p
Axial Resolution (nm)
R
min
0
0
Position in the
Measuring Range
Channel p
Accuracy (nm)
A
max
0