Quorum Q150T E User Manual

Q150T Sample Preparation System
10473 - Issue 5 4 Q150T - Instruction Manual
5.10 Aperture Cleaning .......................................................................................... 41
6 Instrument Management .................................................................................... 42
6.1 The Q150T Menus ......................................................................................... 42
6.2 Instrument Settings ........................................................................................ 43
6.2.1 Network .......................................................................................................................44
6.2.2 Generic Sputter...........................................................................................................45
6.2.3 Vacuum.......................................................................................................................46
6.2.4 Maintenance................................................................................................................47
6.2.5 Hardware.....................................................................................................................48
6.3 User Management..........................................................................................49
6.3.1 Changing User Group .................................................................................................49
6.3.2 Managing User Groups ...............................................................................................50
6.4 Film Thickness Monitor ..................................................................................51
6.5 Setting the Date and Time.............................................................................. 51
6.6 Setting up a Network connection ....................................................................52
6.6.1 Configuring a Firewall Exception for Windows Explorer..............................................52
6.6.2 Connecting the Q150 ..................................................................................................52
6.6.3 Network Troubleshooting ............................................................................................53
6.7 Process Logging ............................................................................................ 53
7 Accessories ........................................................................................................ 54
7.1 Sputter Insert ................................................................................................. 54
7.2 Carbon Rod Insert.......................................................................................... 56
7.2.1 Shaping Carbon Rods for Pulsed Evaporation ............................................................57
7.2.2 Shaping Carbon Rods for Ramped Evaporation .........................................................58
7.3 Fitting the Carbon Fibre Insert ........................................................................ 58
7.4 Metal Evaporation Insert ................................................................................ 59
7.4.1 Installing a Wire Basket ..............................................................................................59
7.4.2 Installing a Molybdenum Boat for Aperture Cleaning...................................................59
7.4.3 Adapting the Insert for Upwards Evaporation ..............................................................60
7.5 Glow Discharge Insert .................................................................................... 62
7.6 Rotacota Stage .............................................................................................. 64
7.7 Slide Stage .................................................................................................... 65
7.8 102mm Stage and Gearbox ........................................................................... 66
7.9 Tilt Stage ....................................................................................................... 67
7.10 Film Thickness Monitor (FTM) ........................................................................ 68
7.10.1 Replacing the FTM crystal .......................................................................................... 68
7.11 Extended Height Cylinder ............................................................................... 69
7.12 Full Range Vacuum Gauge Assembly ............................................................ 69
7.13 Rotating Vacuum Spigot ................................................................................ 70
7.14 Emergency Stop Module ................................................................................ 71
7.15 Spares ........................................................................................................... 72
7.16 Other Accessories.......................................................................................... 73
8 Service and Maintenance................................................................................... 74
8.1 Maintenance ..................................................................................................74
8.2 Troubleshooting ............................................................................................. 75
8.3 Error Messages.............................................................................................. 75
9 Appendices......................................................................................................... 78
9.1 Profile Parameters .........................................................................................78
9.2 System Overrideable Parameters ................................................................... 83
9.3 Technical Specification................................................................................... 84
9.4 Sputtering Deposition Rate............................................................................. 85
9.5 Return of Goods............................................................................................. 88
9.5.1 General Introduction....................................................................................................88
9.5.2 Health and Safety Declaration .....................................................................................88
9.5.3 Despatch..................................................................................................................... 88
9.5.4 Return Address:.......................................................................................................... 88
9.5.5 Declaration of Contamination Form .............................................................................89
10 Index ................................................................................................................... 90

Quorum Q150T E Specifications

General

Brand	Quorum
Model	Q150T E
Category	Laboratory Equipment
Language	English