Quorum Q150T E User Manual

Q150T Sample Preparation System
Q150T - Instruction Manual 3 10473 - Issue 5
Contents
Section Contents
1 Introduction.......................................................................................................... 8
1.1 General Description .........................................................................................8
1.2 Sputter Coating................................................................................................9
1.3 Carbon Coating................................................................................................9
1.4 Metal Evaporation ............................................................................................9
1.5 Aperture Cleaning ............................................................................................9
2 Installation.......................................................................................................... 10
2.1 Pre-installation............................................................................................... 10
2.1.1 Required Services .......................................................................................................10
2.2 Unpacking...................................................................................................... 11
2.3 Connections................................................................................................... 12
2.3.1 Gas Connections ........................................................................................................13
2.3.2 Electrical Connections.................................................................................................14
2.3.3 Aux Network Connection .............................................................................................14
2.3.4 Vacuum Connections ..................................................................................................15
2.3.5 Fitting the Standard Stage........................................................................................... 16
2.3.6 Optional Connections ..................................................................................................16
3 Operation............................................................................................................ 17
3.1 Switching On for the First Time ...................................................................... 17
3.1.1 The Standby screen ....................................................................................................17
3.2 Running a Profile ...........................................................................................18
3.3 System Settings............................................................................................. 20
4 Working with Profiles......................................................................................... 21
4.1 Editing the Active Profile ................................................................................ 21
4.2 Profile Editor .................................................................................................. 21
4.2.1 Creating a New Profile ................................................................................................23
4.2.2 Editing Profile Parameters...........................................................................................24
4.3 Materials........................................................................................................ 25
4.3.1 Creating a New Material ..............................................................................................26
4.3.2 Editing Material Parameters ........................................................................................26
4.3.3 Deleting a Material.......................................................................................................27
5 Application Guidelines ...................................................................................... 28
5.1 QT Timed Sputter .......................................................................................... 28
5.1.1 Tungsten SEM work....................................................................................................28
5.1.2 High resolution SEM coatings for field emission SEM ................................................28
5.1.3 Aluminium thin film......................................................................................................29
5.2 QT FTM Terminated Sputter........................................................................... 30
5.2.1 High resolution SEM coatings for field emission SEM ................................................30
5.2.2 General thin film coatings............................................................................................30
5.3 Metal Evaporation .......................................................................................... 31
5.3.1 How to achieve a 20nm gold coating ...........................................................................31
5.4 Pulsed Cord Evaporation................................................................................ 32
5.4.1 How to create a 20nm carbon coating .........................................................................32
5.5 Controlled Pulse Cord Evaporation................................................................. 32
5.5.1 Using Controlled Pulse to create a 15nm coat or 2-3nm for EBSD.............................32
5.6 Pulsed Rod Evaporation................................................................................. 34
5.6.1 How to create a conductive layer for SEM................................................................... 34
5.7 Ramped Profile .............................................................................................. 35
5.7.1 Carbon insert setup.....................................................................................................35
5.7.2 The ramped current profile..........................................................................................36
5.7.3 Adjusting coating thickness.........................................................................................37
5.7.4 How to create a carbon support layer For TEM........................................................... 37
How to create a conductive carbon layer for SEM ....................................................................38
5.8 Using Outgas Source options......................................................................... 39
5.8.1 Setting Outgas Source options ................................................................................... 39
5.8.2 Running Multiple Outgassing ......................................................................................39
5.9 Glow Discharge..............................................................................................40
5.9.1 Hydrophilisation...........................................................................................................40
5.9.2 Surface Cleaning.........................................................................................................40

Quorum Q150T E Specifications

General

Brand	Quorum
Model	Q150T E
Category	Laboratory Equipment
Language	English