Quorum Q150T E - Table 28 Metal Evaporation Profile Parameters

Q150T Sample Preparation System
10473 - Issue 5 82 Q150T - Instruction Manual
Table 28 Metal Evaporation profile parameters
Name Default
Value
Minimum
Value
Maximum
Value
Comment
Material Carbon Material to be evaporated in this
process
Evaporation
Current (A)
0 0 50 Current applied during the
evaporation pulse
Evaporation time
(Minutes)
1 0.1 4 Duration of evaporation pulse
Out Gas Time
(Seconds)
10 2 60 Time source is outgassed
before evaporation pulse.
Out Gas Current
(A)
20 0 40 Current applied tosource at the
start of outgas step.
Thus allowing automated out
outgassing.
Note the current during the out
gas may be adjusted.
Max Out Gas
Current
(A)
40 0 50 Maximum current that can be
set during outgas
Max Out Gas
Voltage
(V)
10 0 20 The voltage across the rod is
limited to this value during
Outgas
Outgas source Yes No Yes Include or exclude outgassing
step
Tooling Factor 5 0.1 10 Tooling factor for this process
Pump hold No No Yes
If Yes, Q150T pumps down to
outgas-ready state and waits for
user input.
Note: If hold time (set in
System | Vacuum | Pump hold
time – see page 46) is
exceeded, Q150T vents
chamber.
Flush chamber No No Yes
Set to Yes to flush chamber
with nitrogen before pumping
down.