Quorum Q150T E - Technical Specification

Q150T Sample Preparation System
10473 - Issue 5 84 Q150T - Instruction Manual
9.3 Technical Specification
Table 1 lists the technical specification of the Q150T.
Table 32 Technical Specification
All instruments
Instrument Case
585mm Wide x 4700mm Deep x 410mm High
Work Chamber
Borosilicate Glass 165mm Dia x 127mm High
Safety Shield
PET
Ultimate vacuum
5x10
-5
mbar
Turbomolecular Pump
60 litres/sec
Vacuum Gauge Range
1000 - 5x10
-4
mbar
Fuse
T 10A ceramic (5x20mm); fuse standard IEC60127-2
Weight
33.4 kg
Sputter Coater (Q150T S and Q150T ES)
Target
54mm Dia x 0.2mm Thick (Chromium fitted as Standard)
Specimen Stage
60mm Dia. Rotating Stage
Deposition Current
0-150mA
Deposition Rate
0-20nm/Minute
Sputter Timer
0-10 minutes
Evaporation (Q150T E and Q150T ES)
Evaporation current (rod)
0-90A
Outgas current
0-50A
Carbon source
3.2mm rods or carbon cord