Quorum Q150T E - Table 27 Ramped Profile Parameters

Q150T Sample Preparation System
Q150T - Instruction Manual 81 10473 - Issue 5
Table 27 Ramped profile parameters
Name Default
Value
Minimum
Value
Maximum
Value
Comment
Evaporation
Current
46 5 60 Maximum evaporation current.
Evaporation time
(min)
1.5 0.1 4 The time the current is applied.
Starts when the evaporation
Current exceeds Pre Evap end
current.
Out Gas Time (s) 10 2 120 Time cord or rod is outgassed.
Outgas Current 20 2 50 Time cord or rod is outgassed
before pulse cycle(s).
Pre Evap Rate*
(A/S)
1 0.5 20 Rate at which the current is
increase after the outgas time.
PreEvap End
current (A)
32 0 60 The output current at which the
above ramp rate is stopped.
The evaporation time is started
at this point.
Current Ramp
Rate (A/S)
0.20 0.01 20 Rate at which the current is
increase until the value of
Evaporation current property is
reached.
Tooling Factor 1.0 0.1 10 Tooling factor for this process.
Pump hold* No No Yes If Yes the process will pump
down to an outgas ready state
and wait for user input. After the
System>Vacuum>Pump hold
time has expired the system
will vent the chamber.
Flush chamber* No No Yes
Set to Yes to flush chamber
with nitrogen before pumping
down.
* Admin group level required to edit this property