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Q150T Sample Preparation System

10473 - Issue 5 6 Q150T - Instruction Manual

List of Tables

Table 1 Q150T Default Profiles ...............................................................................................18

Table 2 Profile icons ................................................................................................................22

Table 3 Materials and their density...........................................................................................25

Table 4 Material parameters.....................................................................................................26

Table 5 QT Pulsed cord evaporation parameters for 20nm coating. ........................................32

Table 6 QT Controlled Pulsed cord evaporation parameters for 25nm coating. .......................32

Table 7 QT Pulsed rod evaporation parameters for conductive layer for SEM.........................34

Table 8 QT Ramped Carbon TEM parameters for 5nm coating ..............................................37

Table 9 QT Ramped Carbon parameters for SEM coatings ....................................................38

Table 10 Outgas Source options................................................................................................39

Table 11 Glow discharge treatments..........................................................................................40

Table 12 Q150T Menus .............................................................................................................42

Table 13 Generic Sputter parameters ........................................................................................45

Table 14 Vacuum parameters ....................................................................................................46

Table 15 Maintenance settings ..................................................................................................47

Table 16 Hardware settings .......................................................................................................48

Table 17 Spare Parts for the Q150T ..........................................................................................72

Table 18 Replacement targets for Q150T S and Q150T ES .....................................................72

Table 19 Accessories for the Q150T .........................................................................................73

Table 20 Maintenance Tasks ..................................................................................................... 74

Table 21 Error Messages...........................................................................................................75

Table 22 Warning Messages .....................................................................................................77

Table 23 Information Messages .................................................................................................77

Table 24 FTM/Timed Sputter Coating parameters.....................................................................78

Table 25 Carbon Pulse/Rod Evaporation profile parameters......................................................79

Table 26 Controlled Pulse cord..................................................................................................80

Table 27 Ramped profile parameters .........................................................................................81

Table 28 Metal Evaporation profile parameters ..........................................................................82

Table 29 Aperture Cleaning profile parameters ..........................................................................83

Table 30 Vacuum shutdown properties......................................................................................83

Table 31 System override properties ..........................................................................................83

Table 32 Technical Specification ...............................................................................................84

Table 33 Declaration of Contamination Form .............................................................................89

Quorum Q150T E User Manual

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