Scientifica IVM - System Specifications; Technical Specifications

6.0 Specifications |3
6.0 Specifications
Number of axes 3
Travel 70 mm
Step size 20 nm
Speed (minimum) 0.1 µm per second
(maximum) 4 mm per second
Mechanical Resolution <1 µm
Load Capacity >0.2 Kg
Temperature range Operation 15 to +40ºC
Storage 0 to +60ºC