Contents
vii
Use of Setting File ...................................................................................................... 2-7
Loading of Setting File ........................................................................................................2-7
Copying Setting File ...........................................................................................................2-9
Resetting Setting File ....................................................................................................... 2-10
Name Change of Setting File ............................................................................................2-11
Setting of Basic Conditions .............................................................................. 2-13
Setting of Detail Conditions .............................................................................. 2-14
Setting of Measurement Conditions [Measurement] ........................................................ 2-15
Settings of Camera [Camera] ........................................................................................... 2-25
Settings of Display State [Display] .................................................................................... 2-25
System Settings ................................................................................................. 2-27
Settings of System Con¿guration [Con¿guration] ............................................................. 2-27
Settings of Angle Calibration [Calibration] ........................................................................ 2-30
Veri¿cation of System Information [Information] ............................................................... 2-30
3 Measuring 3-1
Overview of Measurement Screen ............................................................................ 3-2
Settings of the Measurement Mode .......................................................................... 3-3
Settings of the Judgment Area .................................................................................. 3-5
Veri¿cation of Measurement and Judgment Results .............................................. 3-9
The Measurement Mode is Single ...................................................................................... 3-9
When the Measurement Mode is Multi Relative ............................................................... 3-10
The Measurement Mode is Multi Absolute ........................................................................3-11
The Measurement Mode is Offset Tilt ............................................................................... 3-12
4 Angle Calibration 4-1
Overview of Angle Calibration ................................................................................... 4-2
Wedge Substrate and Wedge Mirror that can be Used (made by Suruga Seiki) ............... 4-2
Angle Calibration ........................................................................................................ 4-3
5 Control from Peripheral Devices 5-1
Connection Speci¿cations with Peripheral Devices ............................................... 5-2
Connection with RS232C ................................................................................................... 5-2
Connection with Ethernet ................................................................................................... 5-3
Data Communication Format ..................................................................................... 5-4
Measurement Results Output Formats ............................................................................... 5-4
Device Control with External Commands ................................................................ 5-5
List of External Commands ................................................................................................ 5-5
Command Format ............................................................................................................... 5-8
Communication Error ........................................................................................................ 5-30
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