Ulvac G-TRAN Series User Manual

2
2. Specification
The Multi ionization gauge sensor unit ST200 is a vacuum gauge that can measure the
high vacuum pressure by connecting a dedicated sensor unit (triode gauge type).
The following three types of interfaces are available. Users can select the
specification that best suits the communication protocol.
Analog output type : ST200-A (this manual)
Serial communication type : ST200-R (this manual)
EtherCAT communication type : ST200-E (separate manual)
(Hereinafter, ST200 refers to both ST200-A and ST200-R.)
By connecting an optional unit to ST200, ST200 can control each connected unit.
According to the unit connected, the three modes below are available to measure from
high vacuum to atmospheric pressure.
※ SWU series is available in the Windows/Android-compatible【SWU10-U】and
RS-485 communication-compatible 【SWU10-R】. SWU written in this manual
is SWU10-R. SWU10-U cannot connect to ST200.
※ SPU and SWU cannot operate at the same time.
※ SAU cannot connect to ST200 without SPU or SWU.
10
-7
10
-6
10
-5
10
+5
10
-4
10
+3
10
+4
SAUｺﾝﾋﾞﾈｰｼｮﾝﾓｰﾄﾞ
圧力ｾﾝｻﾕﾆｯﾄ(SAU)
＋SWU/SPU
＋ST200
10
-3
10
-2
10
-1
10
0
10
+1
10
+2
ﾓｰﾄﾞおよび構成
圧力(Pa)
ST200単体ﾓｰﾄﾞ
ST200のみ
SPU/SWUｺﾝﾋﾞﾈｰｼｮﾝﾓｰﾄﾞ
ﾋﾟﾗﾆｹﾞｰｼﾞ(SWU/SPU)
＋ST200
10
-8
ST200
SAU
ST200
SPU
SWU
ST200
SPU
SWU
Mode and
configuration
SPU/SWU
combination
mode
P
irani gauge (SWU/SPU)
+ ST200
SAU
combination mode
Pressure sensor unit
(SAU)
+ SWU/SPU + ST200
Pressure (Pa)
S
T200 stand-alone mode
ST200 only

Ulvac G-TRAN Series Specifications

General

Brand	Ulvac
Model	G-TRAN Series
Category	Measuring Instruments
Language	English