Ulvac G-TRAN Series User Manual

Ulvac G-TRAN Series

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V

Revision history

Date

Number

Reason

2021/03/03 00 First edition

Table of Contents

Default Chapter2
- Before Using this Product2
- Safety Symbol Marks2
- Safety Precautions3
- Revision History5
- Table of Contents6
1 Dedicated Application9
2 Specification10
- Unpacking and Checking Accessories11
- St200 Standard Specifications12
- Specifications14
- Standard Specifications14
- Standard Specifications15
3 Handling Precautions17
- Precautions on Operating Environment17
- Precautions on Power Supply18
- Precautions on Installation18
- Precautions on Operation and Handling18
- Operation19
4 Name of each Part and Its Function20
- Controller Section St200-A/R20
- Panel Section St200-A/R21
- I/Oconnector Serial Communication Type23
- St200-R23
- Swu/Spu I/O Connector24
- Sau I/Oconnector25
5 Power Supply Internal Circuit26
6 Each Mode Setting（Common to St20026
A/R26
- Sau Combination Mode Only27
- Status of each Led27
- Power Led Status （ Common for St20027
- A/R27
- Swu/Spu Led Status （ Common for St20027
- Sau Led Status （ Common for St200-A/R27
- Power Led Blinking Status （St200-A27
  - Control Input Signal28
- Control Input Signal (St200-Aonly )28
- Fil On/Off Signal29
- Degas On/Off Signal29
7 Status of each Led27
9 Measured Value Output（Common to St200-30
A/R30
- Pressure Conversion Formula30
- St200+Swu Measured Value Output31
- St200+Spu Measured Value Output32
- Simplified Conversion Table34
10 Control Output Signal35
- Only35
- Serial Communication Output Signal (St200-Ronly )35
- Sensor Error Signal (St200-Aonly )36
- Setpoint Operation Signal37
- Only37
- (St200-Aonly )37
11 Setpoint Setting (St200-A Only)38
- Operating Pressure Range of Setpoint38
- Setpoint On/Off Pressure39
- Setpoint Setting of St200-A39
12 Filament Power Monitoring Signal39
13 SAU ATMOSPHERIC PRESSURE ADJUSTMENT. Checking the Value of40
- St200-R40
- Atmospheric Pressure Adjustment of St200-A40
- Zero Point Adjustment of St200-A40
- Adjustment of St200-R40
14 Swu Atmospheric Pressure and Zero41
Point Adjustment41
- St200-A41
- Zero Point Adjustment of St200-A41
- Adjustment of St200-R41
15 How to Use Serial Communication42
St200-R42
- Communication Specifications42
- Settings42
- Command45
- Status Setting List50
  - When Writing Status50
  - When Reading Status51
- Ascii Code Table52
16 Replacement of Sensor53
- Replacing the Sensor53
- INSTALLATION Tool54
  - Baffles54
- Etc54
  - Installation of Meshes and54
  - Baffle (Option)54
17 Troubleshooting55
- Check59
- Of the Sensor59
18 Technical Report60
- Sensitivity Coefficient60
19 Warranty63
20 Ec Declaration of Conformity65
21 Certificate of Contamination66
22 Diagrams67
- St200-A/R,Swu and Sau68
- Dimensions69
- Sensor Dimensions70
- Display Unit Cable71
- Unit Cable Guc-200P72
- Unit Cable Guc-200A73

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Ulvac G-TRAN Series Specifications

General

Brand	Ulvac
Model	G-TRAN Series
Category	Measuring Instruments
Language	English

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