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2.2. ST200 standard specifications
Name Multi ionization gauge sensor unit
Type Analog output type Serial communication type
Model ST200-A ST200-R
Compatible sensor SWT-16 (NW16), SWT-25 (NW25): 1
Compatible
measuring unit
Pirani gauge SWU : 1
Pirani gauge SPU : 1
Pressure sensor unit SAU : 1
※SWU and SPU cannot operate
together.
Repeatability (N
2
) ST200 stand-alone mode: ±2％
Measuring gas type Indicate pressure as sensitivity to N
2
gas
Emission current 2mA (1.0×10
Pa or lower), 10uA (1.0×10
Pa or higher)
DEGAS Electron bombard method
ST200 starts DEGAS at an emission current of 2mA, grid voltage
of approx.330V, and approx.1.0×10
-2
Pa or less.
Sampling time 5times in 60msec moving average
Measured Value
output
Output voltage DC 0 to 10V, LOG output 0.75V/1 digit
Pressure[Pa] conversion formula
V=7.25+0.75*(LogP-2) P=10^{(V-7.25)/0.75+2}
Update time 60msec
Resolution approx.2.5mV
Output
impedance
100Ω
Control output
signal
Sensor Error, Setpoint1/2/3,
Emission valid,
Filament electric power
monitoring
Rated: Less than the supply
voltage,50mA
MAX
Saturation voltage 1V
Communication USB Type-C
RS-232C, RS-485 half duplex
Communication
speed
9600/19200/38400bps
LED display POWER: Power, error, filament status display
SWU/SPU: Pirani gauge SWU/SPU status display
※SWU/SPU combination mode, SAU combination mode only
SAU: Pressure sensor SAU status display
※SAU combination mode only
Sensor Material
Filament: Ir/Y
2
O
3
coated
Other: PtC-Mo, SUS304, W, Kovar glass, Kovar/Ni plated
Sensor
breaking pressure
2.0×10
+5
Pa（absolute pressure）
※ Please consider the breaking pressure of flanges and clamps
separately.
Sensor
internal volume
SWT-16: 17cm
3
, SWT-25: 19 cm
3
Operating
temperature range
10℃ to 50℃
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