Ulvac G-TRAN Series User Manual

VI
Table of contents
BEFORE USING THIS PRODUCT ....................................... II
SAFETY SYMBOL MARKS ............................................. II
SAFETY PRECAUTIONS ............................................. III
REVISION HISTORY ................................................. V
TABLE OF CONTENTS ............................................... VI
1. DEDICATED APPLICATION ............... 1
2. SPECIFICATION ....................... 2
2.1. UNPACKING AND CHECKING ACCESSORIES ..... 3
Accessories ................. 3
Items that need to be ordered
separately .......................... 3
2.2. ST200 STANDARD SPECIFICATIONS ........ 4
2.3. ST200 STAND-ALONE MODE STANDARD
SPECIFICATIONS
........................... 6
2.4. SWU COMBINATION MODE (ST200+SWU)
STANDARD SPECIFICATIONS
.................... 6
2.5. SPU COMBINATION MODE (ST200+SPU)
STANDARD SPECIFICATIONS
.................... 7
2.6. SAU COMBINATION MODE
(ST200+SWU/SPU+SAU) STANDARD SPECIFICATIONS 8
3. HANDLING PRECAUTIONS ................ 9
3.1. PRECAUTIONS ON OPERATING ENVIRONMENT ... 9
3.2. PRECAUTIONS ON POWER SUPPLY.......... 10
3.3. PRECAUTIONS ON INSTALLATION.......... 10
3.4. PRECAUTIONS ON OPERATION AND HANDLING .. 10
3.5. CHECK ITEMS IMMEDIATELY AFTER THE
OPERATION
.............................. 11
4. NAME OF EACH PART AND ITS FUNCTION .. 12
4.1. CONTROLLER SECTION ST200-A/R ....... 12
4.2. PANEL SECTION ST200-A/R .......... 13
4.3. I/O CONNECTOR ANALOG OUTPUT TYPE ST200-
A ............................... 14
4.4. I/O CONNECTOR SERIAL COMMUNICATION TYPE
ST200-R .............................. 15
4.5. SWU/SPU I/O CONNECTOR ............ 16
4.6. SAU I/O CONNECTOR .................17
5. POWER SUPPLY INTERNAL CIRCUIT ...... 18
6. EACH MODE SETTING（COMMON TO ST200-
A/R） .................................. 18
7. STATUS OF EACH LED ................. 19
7.1. POWER LED STATUS（COMMON FOR ST200-
A/R） ................................19
7.2. SWU/SPU LED STATUS（COMMON FOR ST200-
A/R） ................................19
7.3. SAU LED STATUS（COMMON FOR ST200-A/R）
................................19
7.4. POWER LED BLINKING STATUS（ST200-A
ONLY
） ................................19
8. CONTROL INPUT SIGNAL ............... 20
8.1. CONTROL INPUT SIGNAL (ST200-A ONLY) ..20
8.2. FIL ON/OFF SIGNAL .................21
8.3. DEGAS ON/OFF SIGNAL ...............21
9. MEASURED VALUE OUTPUT（COMMON TO ST200-
A/R） .................................. 22
9.1. PRESSURE CONVERSION FORMULA ..........22
9.2. ST200 STAND-ALONE MODE MEASURED VALUE
OUTPUT
................................22
9.3. ST200+SWU MEASURED VALUE OUTPUT ......23
9.4. ST200+SPU MEASURED VALUE OUTPUT ......24
9.5. ST200＋SWU(SPU)+SAU MEASURED VALUE
OUTPUT
................................25
9.6. SIMPLIFIED CONVERSION TABLE ..........26
10. CONTROL OUTPUT SIGNAL ............ 27

Ulvac G-TRAN Series Specifications

General

Brand	Ulvac
Model	G-TRAN Series
Category	Measuring Instruments
Language	English