Zeiss EVO Series - User Manual

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EVO

series

Scanning Electron Microscope

Instruction Manual

Main Page

Table of Contents3
About this Manual9
Safety Instructions in this Manual10
Typographical Conventions11
Definition of Terms12
Safety13
Intended Use13
Prevention of Accidents and of Improper Use13
Safety Summary14
Hazards Related to Personal Injury14
Hazards Not Related to Personal Injury17
Fire Risk Summary19
Safety Equipment20
Safety Devices20
Protective Cover Panels20
Column Interlock20
Vacuum Interlock System20
Beam Deceleration Kit Interlock System21
Main Circuit Breaker21
Main Shut-Off Valves21
Safety Labels21
At the Rear of the Electron Optical Column (with Optional Ion Pump System Only)22
At the Rear of the Instrument23
Inside SEM24
Description25
Overview25
EVO ® MA and LS26
Evo ® Hd26
Control Elements27
Smartsem ® User Interface27
Dual Joystick28
Optional Control Panel29
Principle of Operation30
Vacuum System30
High Vacuum Mode32
Variable Pressure Mode33
Extended Pressure Mode35
Pressure Ranges and Apertures36
Specimen Stage38
Electron Optics39
EVO Column Optibeam Modes41
Signal Detection43
Principles of Detection44
SE Detector (SE Detector)46
VPSE G3 Detector (Optional)51
HD)BSD Detector (Optional)53
CL Detector (Optional)54
STEM Detector (Optional)55
Specification56
Evo56
Evo ® Hd57
Technical Data58
Layout and Connections58
System Layout59
Installation Requirements60
Options62
Customer Service62
Transport and Storage63
Transport63
Storage64
Installation65
Operation67
Switching on the SEM67
Starting the Smartsem ® User Interface68
Finding Your Way in the Smartsem ® User Interface70
Showing or Hiding Toolbars70
Showing or Hiding the Data Zone71
Showing and Hiding a Full Screen Image71
Using Docking Panels72
Opening the Panel Configuration Bar74
Obtaining a First Image75
Preparing the Specimen Holder76
Loading the Specimen Chamber77
Locating the Specimen81
Switching on the Gun82
Switching on the EHT83
Generating, Optimising and Saving Images85
Generating an Image85
Optimising the Image87
Saving the Image90
Using Automated or Semi-Automated Functions91
Using the Auto Saturation Function91
Using the Auto Gun Alignment Function92
Using the Auto Aperture Alignment Function93
Using the Drift Correction Function94
Using the Sample Type Selection Function96
Using the Image Navigation Function98
Using the Automated Image Acquisition Function99
Setting SEM Conditions104
Consider the Properties of the Specimen104
Guide to SEM Operating Parameters105
Selecting the Operation Mode107
Changing the Pressure Mode109
Changing to HV Mode109
Changing to Variable Pressure Configuration from High Vacuum Configuration110
Changing to Extended Pressure Mode112
Aligning Easy VP113
Changing from Easyvp to Variable Pressure Mode118
Changing from Easyvp to Extended Pressure Mode118
Changing from VP Mode / EP Mode to Easyvp119
Measuring the Specimen Current (Probe Current Monitor)119
Setting Detection Parameters121
Selecting a Detector121
Using the SE Detector122
Using the BSD Detector (Optional)122
Other Optional Detectors129
Imaging Wet Specimens with the Peltier Coolstage130
Fitting the Peltier Coolstage130
Purging the Chamber141
Obtaining an Image in EP Mode144
Setting SEM Parameters for Imaging the Specimen in Wet Mode144
Using the Help Functions146
Calling the Smartsem ® Help146
Printing Help Texts146
Bringing Help Texts to the Foreground146
Calling the Context-Sensitive Help147
Searching for a Topic147
Using the Step-By-Step Guides148
Getting Started148
Frequently Used Operation Sequences148
Calling the Short Cuts Help149
Showing Information about Smartsem150
Version History150
About Smartsem150
Finishing the Work Session151
Tungsten Emitter151
Lab6 Emitter151
Closing the Smartsem ® User Interface152
Logging off152
Exiting152
Switching off the SEM as a Matter of Routine153
Changing to STANDBY Mode153
Changing to off Mode154
Switching off in an Emergency155
Switching on Again after an Emergency off155
Switching off the SEM Completely156
Maintenance and Repair159
Change of Consumables and Chemicals160
Adjusting the Isolation Mounts161
Replacing the Tip Seal of the Pre-Vacuum Pump162
Replacing Filaments163
Replacing Pre-Aligned Tungsten Filaments164
Replacing Tungsten Filaments (Not Pre-Aligned) - Cleaning, Maintenance & Alignment174
Replacing Lab6 Filaments184
Replacing Lab6 Filaments with Tungsten Filaments198
Basic Preventive Maintenance Performed by the Operator215
Checking for Safe Operation215
Cleaning up the PC215
Initialising the Stage215
Servicing the Pre-Vacuum Pump216
Baking out the Gun and the Chamber216
O-Ring Maintenance217
Checking the Column O-Ring217
Checking the Chamber Door O-Ring218
Cleaning the Firing Unit220
Cleaning the Filament Holder223
Cleaning the Anode224
Preventive Maintenance Performed by a ZEISS Service Representative227
Repair228
Replacing the Chamber Door O-Ring228
Checking the Circuit Breakers230
Troubleshooting231
Shutdown and Disposal233
Putting the SEM out of Operation233
Disposal233
Disposing of Solid Waste (Consumables)233
Disposing of the SEM234
Parts and Tools235
Important Consumables235
Important Spare Parts236
Optional Software Licences236
Tools and Accessories236
Abbreviations237
Glossary239
Declaration of Conformity241
Index243

Brand	Zeiss
Model	EVO Series
Category	Microscope
Language	English

Zeiss EVO Series - User Manual

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