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Zeiss EVO User Manual

Zeiss EVO
180 pages
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Instruction Manual
ZEISS EVO
Scanning Electron Microscope

Table of Contents

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Zeiss EVO Specifications

General IconGeneral
TypeScanning Electron Microscope (SEM)
Vacuum ModeHigh Vacuum, Variable Pressure
SoftwareSmartSEM
Acceleration Voltage0.2 - 30 kV
DetectorsSE, BSE
Filament TypeTungsten
MagnificationUp to 1, 000, 000x
Vacuum SystemTurbo molecular pump
Resolution3.0 nm at 30 kV
Stage MovementMotorized 5-axis stage

Summary

General Information

Explanation of Warning Messages and Additional Information

Explains the meaning of DANGER, WARNING, CAUTION, NOTICE, and INFO signal words for hazard communication.

Safety

Intended Use

Defines the intended purpose of the microscope system and its limitations for safe operation.

General Safety Information

Outlines general safety instructions, regulations, and requirements for operating personnel and the system.

Prevention of Hazards

Summarizes potential hazards and recommended safety precautions to prevent injury and damage.

Safety Devices and Interlocks

Details the safety devices and interlocks integrated into the microscope system to prevent hazards.

Installation

First Operating Steps

Switching On the Microscope System

Guides through the procedure for energizing and safely starting the microscope system.

Acquiring an Image

Provides step-by-step instructions for obtaining an image using the SE detector.

De-energizing the Microscope

Details the procedure to completely cut off power from the electrical main supply for safety.

Performing an Emergency Shutdown

Explains how to perform an emergency shutdown to quickly stop the microscope in critical situations.

Care and Maintenance

Safety During Cleaning and Maintenance

Outlines safety precautions to be followed during cleaning and maintenance procedures.

Troubleshooting

Chamber

Addresses common problems related to the specimen chamber and provides solutions.

Column

Covers troubleshooting steps for issues related to the electron optical column and its components.

Power Circuit

Discusses checking circuit breakers and other power-related issues in the microscope system.

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