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General| Type | Scanning Electron Microscope (SEM) |
|---|---|
| Vacuum Mode | High Vacuum, Variable Pressure |
| Software | SmartSEM |
| Acceleration Voltage | 0.2 - 30 kV |
| Detectors | SE, BSE |
| Filament Type | Tungsten |
| Magnification | Up to 1, 000, 000x |
| Vacuum System | Turbo molecular pump |
| Resolution | 3.0 nm at 30 kV |
| Stage Movement | Motorized 5-axis stage |
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