Zeiss EVO - Principle of Signal Detection

3 Product and Functional Description | 3.3 Detectors ZEISS
3.3.1 Principle of Signal Detection
When a primary electron (PE) beam hits a specimen, certain electron beam interaction processes
occur. The interaction products most frequently used for the generation of images in scanning
electron microscopy are secondary electrons (SEs) and backscattered electrons (BSEs).
Specific types of detectors are able to detect the SEs and BSEs. The detector signals can be used
to create images and produce information about the properties of the specimen.
1
2
3
Fig.12: Interaction between primary electron beam and specimen
1 Objective lens 2 Interaction volume
3 Specimen
1
4
5
6
7
2
3
Fig.13: Interaction between primary electron beam and specimen
1 Primary electrons 2 Auger electrons
3 Secondary electrons 4 Backscattered electrons
5 Characteristic X-rays 6 Continuum X-rays
30 Instruction Manual ZEISS EVO | en-US | Rev. 10 | 354706-0780-006