Zeiss EVO - Vacuum System

3 Product and Functional Description | 3.1 Vacuum System ZEISS
Column maintenance kit, O-ring kit
Dual joystick for stage control and specimen navigation
Refer to Dual Joystick [
} 47]
Control panel that allows direct access to the most frequently used
functions
Refer to Control Panel
Emergency Off Circuit
Refer to Emergency Off (EMO) Option External
Software add-ins and enhancements
For full details about the available options and accessories, contact your local ZEISS service repre-
sentative, or sales representative.
3.1 Vacuum System
Purpose
For operation of the microscope, the gun head, the column, and the specimen chamber have to
be evacuated. The vacuum is essential to operate the gun and to prevent collisions of electrons
with gas molecules.
1
2
4
5
6
3
8
7
Fig.6: Schematics of the vacuum system, high vacuum, pre-vacuum
1 Penning gauge 2 Turbo isolation valve (TIV)
EVO with variable pressure option only
3 Turbo pump 4 Pre-vacuum pump
5 Gun head 6 Specimen chamber
7 Chamber shut off valve (CSOV)
EVO with variable pressure option only
8 Vent valve
System Vacuum
The pre-vacuum pump
4
and the turbo pump
3
evacuate the specimen chamber
6
.
The vacuum in the specimen chamber is measured by a Penning gauge
1
. The detected vac-
uum values are displayed as System vacuum in the SmartSEM user interface. As long as the de-
tected pressure in the specimen chamber is not ready for operation, the chamber shut off valve
(CSOV)
7
is closed in order to separate the specimen chamber from the column.
22 Instruction Manual ZEISS EVO | en-US | Rev. 10 | 354706-0780-006