ZEISS 3 Product and Functional Description | 3.5 Optional Components and Accessories
Axis Description Movement
R Rotation Stage rotation parallel to the X-Y plane
T Tilt Stage tilt about an axis parallel to the X axis
The focus on the stage is not maintained when the specimen is tilted. This can be compensated
for by using the Compucentric function in SmartSEM.
3.5 Optional Components and Accessories
3.5.1 Optional Detectors
3.5.1.1 VPSE Detector
Purpose
The Variable Pressure Secondary Electron (VPSE) detector is a specific type of SE detector for use
in Variable Pressure mode where a standard SE detector cannot be used. The VPSE detector is not
usable and will not operate in HV mode.
The Variable Pressure mode enables analyzing and imaging of non-conducting specimens without
charging artefacts. This is possible, because positively ionized gas molecules stabilize local charg-
ing. Variable Pressure mode can also be used for strongly gassing or moist specimens without any
need for specimen preparation.
Fig.25: Schematics of the VPSE detector
1 VPSE detector
The images that are created with the VPSE detector are similar to images that are created with
conventional SE detectors.
Instruction Manual ZEISS EVO | en-US | Rev. 10 | 354706-0780-006 39
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