Zeiss EVO - Replacing Filaments

ZEISS 7 Troubleshooting | 7.2 Column
7.2.1.3 Starting the Bakeout
Info
You cannot work with the microscope while the bakeout procedure runs.
NOTICE
Hot surfaces during bakeout
Parts of the enclosure in the upper range of the column may become hot during bakeout, par-
ticularly after a long bakeout cycle.
4 Do not place any combustible objects on the grids of the electron optical column during
bakeout.
4 After the bakeout procedure, let surfaces cool down before working around the column.
4 Only advanced operators are allowed to perform the bakeout procedure.
Prerequisite
ü
Requires the Supervisor privilege and the user level Service.
ü
Only advanced operators are allowed to perform the bakeout procedure.
Procedure
1. In the Panel Configuration Bar, double-click Bakeout.
à The Bakeout dialog is displayed.
2. If the Full service bakeout checkbox is available, deactivate the Full service bakeout
checkbox.
INFO: Full service bakeout includes column heating that may lead to column misalignment.
3. From the Bakeout drop-down list, select a bakeout cycle.
For 2 hours heating / 1 hours cooling, select Quick.
For 8 hours heating / 2 hours cooling, select Overnight.
For 40 hours heating / 3 hours cooling, select Weekend.
For a cycle defined by the operator, select User.
INFO: You can switch to Standby mode while the bake-out procedure is running. Before
you switch to Standby mode, ensure that the Partial Vent on Standby checkbox is deacti-
vated in the SEM Controls panel.
4. To start the bakeout procedure, click Bakeout Start.
5. After bakeout, allow the column to cool down.
INFO: The pressure changes due to residual heat in the gun area. A cooling period is neces-
sary to allow the vacuum to improve. The cooling period depends on the room tempera-
ture. The gun monitor monitors the pressure improvement as the cooling time progresses.
7.2.2 Replacing Filaments
The filament is the electron source of the microscope. To extract electrons from the filament, it is
heated up and a high voltage is applied. During operation, the filament slowly degrades. The fila-
ment must be replaced if it is used up or damaged.
Info
To display the operating hours of the filament, select View > SEM Status > Select > Fila-
ment Age.
Info
ZEISS encourages all customers to keep a record on the filament exchanges. Such a record
simplifies maintenance.
Instruction Manual ZEISS EVO | en-US | Rev. 10 | 354706-0780-006 121