Zeiss EVO - Troubleshooting; Chamber

7 Troubleshooting |  ZEISS
7 Troubleshooting
The following table provides information about solving common problems.
Info
If you cannot solve the problem or if you are unsure about a certain technical difficulty, con-
tact your local ZEISS service representative.
Symptom Cause Measure
Chamber does not
move freely
Isolation mounts
have lost air
Refer to Adjusting the Isolation Mounts
[
} 119]
Drift: Specimen
seems to be moving
§ Charging effects
§ Nonconductive
specimen
§ Ensure proper conduction of the speci-
men
§ Optimize specimen preparation
§ Apply a charge compensation method
Stub not correctly
fixed by screw
Fix the stub correctly
After an emergency
off, the stored stage
position cannot be
approached correctly
Stage needs to be
initialized
Refer to Initializing the Stage [ } 115]
Gun is switched off
automatically
Gun has been
switched off for
safety reasons since
gun vacuum is worse
than the pressure
threshold
Refer to Baking out the Gun Head [ } 120]
Image is bad at low
EHT (e.g. 1 kV)
Working distance is
too long
Reduce the working distance to a maximum
of 7mm
Image resolution is
low
Saturation values of
the filament are
wrong
Correct saturation values
Lifetime of the fila-
ment is exceeded
Refer to Replacing Filaments [ } 121]
Microscope is dead Circuit breaker is
tripped (lower posi-
tion)
Refer to Checking the Position of the Circuit
Breakers [
} 147]
Stored position of
the specimen stage
cannot be ap-
proached correctly
PC has crashed. Restart the PC
Stage needs to be
driven to a well-de-
fined position
Refer to Initializing the Stage [ } 115]
After a power fail-
ure, the stored stage
position cannot be
approached correctly
Stage needs to be
initialized
Refer to Initializing the Stage [ } 115]
SE image is noisy Scintillator is used up Contact your local ZEISS service representa-
tive to have the scintillator replaced
114 Instruction Manual ZEISS EVO | en-US | Rev. 10 | 354706-0780-006