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Details the names and functions of the main unit and rear view of the SPT-20 Ion Coater.
Covers handling precautions, operational permission, and essential safety guidelines for the SPT-20.
Provides detailed technical specifications for the rotary vacuum pump component.
Lists key specifications for the Ion Coater SPT-20, including target, size, and ranges.
Details the included components and environmental requirements for installing the SPT-20.
Step-by-step instructions for powering on the SPT-20 Ion Coater and its self-diagnosis.
Guides on setting target, current, and time parameters for coating operations.
Graphical representation of coating thickness achieved over time for Au and Pt targets.
Presents SEM images and test conditions for samples coated with Au and Pt targets.
Shows SEM images of various samples (Carbon Powder, Membrane, Si fiber) after Au coating.
Lists common errors ('V-sensor error', 'Touch SW error') and procedures to request service.
Detailed steps for safely replacing the target material on the SPT-20 Ion Coater.
Provides instructions and required items for cleaning the inside of the SPT-20 chamber.
General| Resolution | 3 nm @ 30 kV (High Vacuum), 10 nm @ 3 kV (Low Vacuum) |
|---|---|
| Detector | Secondary Electron Detector (SED) |
| Operating Modes | High Vacuum, Low Vacuum |
| Controller | PC |
| Maximum Sample Size | 100 mm (diameter) x 50 mm (height) |
| Operating System | Windows |
| Type | Benchtop Scanning Electron Microscope |
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