COXEM SPT-20 - Table of Contents

Ion Coater SPT-20 Operating Manual
2
Contents
1. Introduction .................................................................................................................. 4
1.1 Descriptions on Instrument Parts ............................................................................................. 4
1.1.1 Main Unit of SPT-20 ................................................................................................................................... 4
1.1.2 View from Back of SPT-20 ....................................................................................................................... 5
1.2 Cautions before Use .................................................................................................................... 6
1.2.1 Precautions on Handling ......................................................................................................................... 6
1.2.2 Permission by Operation .......................................................................................................................... 7
1.2.3 Safety Guidelines .......................................................................................................................................... 8
2. Specification ................................................................................................................. 9
2.1 Rotary vacuum pump ................................................................................................................. 9
2.2 Ion Coater ..................................................................................................................................... 9
2.3 Composition ............................................................................................................................... 10
2.4 Installation Requirement .......................................................................................................... 10
3. Operation .................................................................................................................... 11
3.1 Power On .................................................................................................................................... 11
3.2 Set-up .......................................................................................................................................... 12
3.3 Coating Thickness ..................................................................................................................... 13
4. Measurement ............................................................................................................. 14
4.1 Measurement of sample due to target ................................................................................. 14
4.2 Measurement of variety samples through Au coating ...................................................... 15
5. Maintenance ............................................................................................................... 16
5.1 Error List ...................................................................................................................................... 16
5.2 Replacing Target ........................................................................................................................ 16
5.3 Cleaning of chamber ................................................................................................................ 17