COXEM SPT-20 - Operation Guide; Power On Procedure

Ion Coater SPT-20 Operating Manual
11
3. Operation
3.1 Power On
① Switch on back side from SPT-20. At this time, Rotary vacuum pump’s power must be plugged
in SPT-20
② After press a power in up-side, Vacuum Begins immediately that reaches to 0.1 torr within 3min
③ Then Self Diagnosis starts
- POWER OK!
- V-Sensor OK!
- Touch SW OK!
Main Power (SPT-20 w/ Rotary vacuum pump)