CAUTIONS
⚫ Excessively high surrounding temperature can cause defects or malfunction of the
instrument. Please maintain a proper instrument installation environment.
(Temperature 20±5°C, humidity: Less than 60%)
⚫ When placed in excessively low temperature, the instrument may experience reduced
vacuum performance due to the changing oil viscosity of the rotary pump. Be sure to
keep the instrument above the optimum temperature.
(Normal operating temperature: 20±5°C)
⚫ Do not install the instrument on the floor with excessive external vibration (Recommended
vibration level is below 35 dB, but there is no trouble to operate)
⚫ When the rotary pump operates, its surface temperature rises. To prevent high heat from
causing fire, do not place ignitable or combustible substances near the pump during
operation.
⚫ When opening or closing the vacuum chamber, do it slowly to prevent injuries.
⚫ To assure proper operation of the instrument, follow the directions described in this
manual.
⚫ Contact the maker’s service representative when moving the instrument. Arbitrary moving
or installing can cause failure or damage of the instrument, which will result in additional
expenses for after-sales service.
⚫ Do not revise or remodel the hardware arbitrarily. Doing so can cause fire or electric
shock, which will result in additional expenses for after-sales service.
⚫ Do not off main power during “Emergency Stop”
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