COXEM SPT-20 - Coating Thickness Guidelines

Ion Coater SPT-20 Operating Manual
13
3.3 Coating Thickness
① Au Target
② Pt Target
0
2
4
6
8
10
12
14
16
0 20 40 60 80 100 120 140 160 180 200 220 240 260 280 300
Thickness (nm)
Time (sec)
3mA
5mA
7mA
0
2
4
6
8
10
12
14
16
0 20 40 60 80 100 120 140 160 180 200 220 240 260 280 300
Thickness (nm)
Time (sec)
3mA
5mA
7mA