COXEM SPT-20 - Chamber Cleaning Instructions

Ion Coater SPT-20 Operating Manual
17
5.3 Cleaning of chamber
- Required item: wipes for laboratory, methyl-alcohols, blowing air
① Wet wipes by methyl-alcohols
② Cleaning inside of chamber, rubber pad that wrapped around chamber and flange surface
inside chamber
Request SVC: Migun Techno World #201, Migun Technoworld, 199
Techno2-ro, Yuseong-gu, Daejeon, Korea
Tel. +82-42-861-1685~8
Fax. +82-42-861-1689
Email. infor@coxem.com