COXEM SPT-20 - Specifications; Rotary Vacuum Pump Specifications; Ion Coater SPT-20 Specifications

Ion Coater SPT-20 Operating Manual
9
2. Specification
2.1 Rotary vacuum pump
Descriptions
Electronic
AC 110V or 220V, 50/60 Hz, 0.12 kW
Dimension
120(W) X 373.5(D) X 200(H) mm
Motor Speed
1,700 rpm
Ultimate Pressure
≤3 X 10
-3
Torr (4.0 X 10
-1
Pa)
Oil Capacity
0.2L
Inlet, Outlet port
NW16
Weight
14.2 kg
2.2 Ion Coater
Descriptions
Power
AC 110/220V, 50/60 Hz, 50W
Dimension
420(W) X 220(D) X 230(H) mm
Target
- Standard: Au / Pt
- Option: Cu, Pd, Pt-Pd, Ag, Al
Size(d)
Chamber
100 mm
Target
50 mm
Stage
60 mm
Current Range
0 ~ 9 mA
Coating Time Range
10 ~ 300 sec