COXEM SPT-20 - Composition and Installation Requirements

Ion Coater SPT-20 Operating Manual
10
2.3 Composition
Item
Number(ea)
Main unit
1
Rotary Pump
1
Au Target
1
Power Cable
1
Vacuum Hose
1
Operation Manual
1
2.4 Installation Requirement
Clean, Dry, Dust Free surface,
Factor
Requirement
Temperature
15 ~ 30℃ (59 ~ 86℉)
Humidity
Less than 60%
Electronic
Voltage
Single Phase, 220V ± 10%,
Power consumption
1 kW
Frequency
50 ~ 60 Hz