COXEM SPT-20 - Maintenance and Troubleshooting; Error List and SVC Request; Target Replacement Procedure

Ion Coater SPT-20 Operating Manual
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5. Maintenance
5.1 Error List
① “V-sensor error”: Normally occur by vacuum → Request SVC
② “Touch SW error”: Normally occur by touch program → Request SVC
5.2 Replacing Target
① First, Wearing poly gloves then remove
insulation support of the electrode
② After tilting the upper with target 45° then
remove a nut of high voltage electrode plate. It
should tilt 45° also when re-assemble
③ It should be checked target and nut tightening
when you re-assembling the target