EBARA ESA200W - Page 57

P.38
PM10U
EBARA
CORPORATION
6.3.6 Setting the pump N2 flow low warning threshold
Use the up and down arrow keys to change the setting value.
△ ： Increase the setting speed by 0.1 Pam
3
/s (Delay time：1 sec)
▽ ： Decrease the setting speed by 0.1 Pam
3
/s (Delay time：1 sec)
Upper limit 81.0 Pam
3
/s (Delay time：60 sec)
Lower limit 2.0 Pam
3
/s (Delay time：5 sec)
6.3.7 Setting the dilution N2 0mode warning threshold (option)
Use the up and down arrow keys to change the setting value.
△ ： Increase the setting speed by 0.1 Pam
3
/s (Delay time：1 sec)
▽ ： Decrease the setting speed by 0.1 Pam
3
/s (Delay time：1 sec)
Upper limit 81.0 Pam
3
/s (Delay time：60 sec)
Lower limit 7.4 Pam
3
/s (Delay time：5 sec)
SET POINT
PUMP N2 WARNING?
ＰＲＧ．
▽
△
N2 FLOW LOW DLY
## sec
ENTER
SET POINT
PUMP N2 FLOW DLY?
ENTER
N2 FLOW LOW
# ． # Pam3/s
ENTER
SET POINT
PUMP N2 FLOW LOW?
Setting
done
ENTER
Use the keys, ”△” and ”▽” to set.
△ ▽
△ ▽
Setting
done
Use the keys, ”△” and ”▽” to set.
ＰＲＧ．
ＰＲＧ．
ＰＲＧ．
SET POINT
PUMP N2 WARNING?
ＰＲＧ．
▽
△
N2 0MODE DLY
## sec
ENTER
SET POINT
N2 0MODE DLY?
ENTER
N2 0MODE
#
． # Pam3/s
ENTER
SET POINT
N2 0MODE?
Setting
done
ENTER
Use the keys, ”△” and ”▽” to set.
Setting
done
Use the keys, ”△” and ”▽” to set.
ＰＲＧ．
ＰＲＧ．
ＰＲＧ．