© Edwards Limited 2009. All rights reserved. Page 1
Edwards and the Edwards logo are trademarks of Edwards Limited.
Introduction
B800-00-880 Issue A
1Introduction
1.1 Scope and definitions
This manual provides installation, operation, maintenance and storage instructions for the Edwards nEXT
Turbomolecular Pumps. You must use the nEXT pumps as specified in this manual. If you do not, the protection
provided by the nEXT pumps may be impaired.
Read this manual before you install and operate the nEXT pump. Important safety information is highlighted as
WARNING and CAUTION instructions; you must obey these instructions. The use of WARNINGS and CAUTIONS is defined
below.
Cautions are given where failure to observe the instruction could result in damage to the equipment, associated
equipment and process
The units used throughout this manual conform to the SI international system of units of measurement; where
appropriate US equivalent units of measurement are also given. When flow rates are specified, the abbreviation
‘sccm’ is used to mean standard cubic centimetres per minute. This is a flow of 1 cm
3
min
-1
at an ambient temperature
of 0 ºC and a pressure of 1013 mbar (1.013 x 10
5
Pa).
In accordance with standard EN61010, the following warning label appears on the nEXT pump:
Warnings are given where failure to observe the instruction could result in injury or death to
people.
Warning - refer to accompanying documentation.
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