Edwards nEXT730 - User Manual

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Turbomolecular pumps

nEXT730, nEXT930, nEXT1230

INSTRUCTION MANUAL

B8J200880_E

Original instructions

Main Page

Table of Contents4
Safety and Compliance10
Definition of Warnings and Cautions10
Safety Symbols11
Trained Personnel11
Important Safety Information12
Mechanical Hazards12
Electrical Hazards13
Thermal Hazards13
Danger through Materials and Substances13
Dangers in Connection with Safety-Related Measures and Precautions14
Overview15
Ordering Information15
Figure 1 Next Model Overview16
Motor Controller17
Operational Features17
Power Limit Setting18
Standby Speed18
Timer18
Analogue Output18
Automatic Vent Options19
Normal Speed Setting19
Electronic Braking20
Bearing Monitoring20
Logic Interface20
USB Interface21
Parallel Control and Monitoring21
Serial Control and Monitoring21
Serial Control with Parallel Monitoring22
Parallel Control with Serial Monitoring or Serial Configuration22
CAN Interface22
Motor Controller Configuration (Serial Configuration)22
Technical Data24
Operating and Storage Conditions24
General Technical Data24
Pumping Speed Curves30
Figure 2 Pumping Speed Curves for Next730H30
Figure 3 Pumping Speed Curves for Next730Q/730D30
Figure 4 Pumping Speed Curves for Next930Q/930D31
Figure 5 Pumping Speed Curves for Next1230H31
Figure 6 Dimensional Drawing for Next730/93032
Figure 7 Dimensional Drawing for Next1230H33
Pumping Media34
Vent Gas Specification and Vent Control Data35
Materials Exposed to Gases Pumped35
Figure 8 Maximum Allowed Rate of Pressure Rise During Venting: Pressure against Time35
Purge Gas Specification36
Water Cooling36
Figure 9 Maximum Relative Humidity to Avoid Condensation with Water Cooling37
Figure 10 Cooling Requirements for Nitrogen for Next730H38
Figure 11 Cooling Requirements for Argon for Next730H38
Figure 12 Cooling Requirements for Nitrogen for Next730Q/930Q39
Figure 13 Cooling Requirements for Argon for Next730Q/930Q39
Figure 14 Cooling Requirements for Nitrogen for Next730D/930D40
Figure 15 Cooling Requirements for Argon for Next730D/930D40
Electrical Data41
Figure 16 Cooling Requirements for Nitrogen for Next1230H41
Figure 17 Cooling Requirements for Argon for Next1230H41
Logic Interface Connector42
Serial Protocol44
Figure 18 Interface Circuits for Next Turbo Pump Controllers44
Command Set46
Multi-Drop Operation53
Figure 19 Conceptual Diagram for Multi-Drop Connection Using RS232 Interface53
Motor Controller Auxiliary Connector Socket54
Figure 20 RS485 Multi-Drop Connection54
Indicator Leds55
Figure 21 Valve Connector55
Installation57
Unpack and Inspect57
Connect to the Vacuum System58
Figure 22 Typical Pumping System with a Next Pump58
Remove and Replace the Inlet Screen59
Figure 23 Connections and Controls59
Mounting Orientation60
Figure 24 Mounting Orientation for Next1230H60
Figure 25 Mounting Orientation for Next1230H INV60
Mount the Pump61
Figure 26 Mounting High Vacuum ISO-F Flange Connection with Clearance Hole63
Figure 27 Mounting High Vacuum ISO-F Flange Connection with Blind Hole Thread64
Figure 28 Mounting High Vacuum Flange ISO-K Flange at ISO-F Flange with Collar Flange65
Figure 29 Mounting High Vacuum Flange ISO-K Flange at ISO-K Flange66
Figure 30 Mounting High Vacuum Flange ISO-K Flange at ISO-F Flange with Claws67
Figure 31 Mounting High Vacuum CF Flange Connection with Clearance Hole68
Backing Port Connection69
Figure 32 Mounting High Vacuum CF Flange Connection with Blind Hole Thread69
Purge Gas Connection70
Recommended Purge Gas Flow70
Connect the Purge Gas70
Electrical Installation70
Earth (Ground) Connections71
TIC or TAG Logic Interface Connections71
Connect the Logic Interface to Control Equipment71
Figure 33 Controller View71
Connect the Electrical Supply72
Connect the Parallel Control and Monitoring73
Figure 34 Power Supply Connector73
Connection for Serial Control and Monitoring74
Figure 35 Logic Interface Connections - Parallel Control74
Figure 36 Simplified Logic Interface Connections - Parallel Control74
Connect the Serial Interface to the Customer Control Equipment75
Serial Enable76
Figure 37 Logic Interface Connections - RS232 Serial Control76
Figure 38 Logic Interface Connections - RS485 Serial Control76
Connection for Mixed Parallel and Serial Operation77
Cooling78
Cooling Requirements78
Figure 39 Logic Interface Connection - Mixed Parallel and Serial Operation78
Forced Air Cooling79
Water Cooling79
Configuration81
Configure the Pump Using Serial Commands81
Message Structure82
Command and Reply Table Definitions82
Power Limit Setting83
Powering a Fan from the Motor Controller84
Controlled Venting Options84
Standby Speed Setting85
Normal Speed Setting85
Timer Setting and Options86
Analogue Signal Options87
Electronic Braking Options87
Factory Settings88
Assigning a Multi-Drop Address88
Configure the Pump Using a TIC89
Operation90
Before Starting the Pump90
Close the Vent Valve90
Pre-Start Sequence90
Vent Options, Vent Valve Connection and Control91
Manual Vent Valve91
TAV5 or TAV6 Solenoid Vent Valve91
Vent Valve Control92
Alternative Valve Connected to the Vacuum System94
Operation with Parallel Control and Monitoring94
Start the Pump with Parallel Control94
Run the Pump at Standby Speed with Parallel Control94
Stop the Pump with Parallel Monitoring95
Parallel Monitoring95
Operation with Serial Control and Monitoring95
Delayed Start with Serial Control95
Start the Pump with Serial Control96
Run the Pump at Standby Speed with Serial Control96
Stop the Pump with Serial Control97
Monitor Temperature Readings with Serial Control97
Monitor Link Parameter Readings with Serial Control97
Monitor Measured Motor Speed with Serial Control97
Mixed Parallel and Serial Operation98
Operation with a TIC or TAG99
Decelerating and Venting99
Operation at Extreme Conditions100
Operation with High Inlet Pressure100
Operation at High Temperatures100
Protection against Over-Speed101
Electrical Supply Failure101
Bakeout102
Shut down the Pump Manually103
Maintenance104
Bearing Maintenance104
Rotor Life105
Cleaning the Pump105
Decoding Service Status Words105
Controller Run Time107
Pump Run Time107
Pump Cycles107
Bearing Run Time108
Storage109
Disposal110
Fault Finding111
Command Set Error Codes114
Flashing Service Codes115
Flashing Error Codes115
Flashing Inactivity Service Codes (Blue Bearing LED)116
Decoding System Status Words117
Service Information119
Service120
Return the Equipment or Components for Service120
Bearing Monitoring and Conditioning System121
Bearing On-Site Maintenance121
Bearing Run in Mode122
Service Counter Reset122
Spares123
Inlet Screen123
Inlet Flange Seals and Integrated Inlet Screens123
Accessories124
Air Cooler124
Water Cooler125
Flange Heater125
TAV5 and TAV6 Vent Valves125
VRX Vent Restrictor126
Vent Port Adaptor126
PRX Purge Restrictor126
Interface Cable127
Nst2 PC Program127
Auxiliary Connector127
Auxiliary Extension Cable127
Auxiliary 'Y' Cable Adaptor128
EPS 800 Power Supply128

Brand	Edwards
Model	nEXT730
Category	Water Pump
Language	English

Edwards nEXT730 - User Manual

Table of Contents

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