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Edwards nEXT730 - Purge Gas Specification; Water Cooling

Edwards nEXT730
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B8J200880_E - Technical data
Page 35
PTFE
4.6 Purge gas specification
Table 8 Purge gas specification
Purge gas specification
Reference data
Purge gas
Dry air, nitrogen, argon or other inert
gases
Maximum dew point at atmospheric
pressure
-22 °C
Maximum size of particulates
1 µm
Maximum concentration of oil
0.1 parts per million
Allowable purge gas flow (when required)
20 to 50 sccm (0.33 to 0.84 mbar l s
-1
or
33 to 84 Pa l s
-1
)
Recommended purge gas flow
25 sccm (0.42 mbar l s
-1
, 42 Pa l s
-1
)
Maximum allowable purge gas supply
pressure
1 bar (gauge); 14.5 psig, 2 x 10
5
Pa
4.7 Water cooling
Table 9 Water cooling block supply requirements
Parameter
Reference data
Quality
Mechanically and optically clear with no
deposits or turbidity
pH value
6.0 to 8.0
Maximum calcium carbonate concentra-
tion
75 parts per million
Maximum chloride concentration
100 parts per million
Minimum oxygen concentration
4 parts per million
Minimum watercooling flow rate (at 15
°C)
15 l hr
-1
Water temperature range
10 °C to 40 °C
Maximum water pressure
5 bar (gauge), 72.5 psig, 5 x 10
5
Pa gauge
Materials exposed to cooling water
Brass and nickel plated brass

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